The utilization of a cold or nonequilibrium plasma in chlorination processing is discussed. Titanium dioxide (TiO2) was successfully chlorinated at temperatures between 700 and 900 C without the aid of carbon. In addition to these initial experiments, a technique was developed for determining the temperature of a specimen in a plasma. Development of that technique has required evaluating the emissivity of TiO2, ZrO2, and FeOTiO2 and analyzing the specimen temperature in a plasma as a function of both power absorbed by the plasma and the pressure of the plasma. The mass spectrometer was also calibrated with TiCl4 and CCl4 vapor.